@article{oai:osu.repo.nii.ac.jp:00001404, author = {中村, 吉伸 and 酒井, 拓也 and 青木, 孝憲 and 鈴木, 晶雄 and 松下, 辰彦 and ナカムラ, ヨシノブ and サカイ, タクヤ and アオキ, タカノリ and スズキ, アキオ and マツシタ, タツヒコ and NAKAMURA, Yoshinobu and SAKAI, Takuya and AOKI, Takanori and SUZUKI, Akio and MATSUSHITA, Tatsuhiko}, journal = {大阪産業大学論集. 自然科学編}, month = {Feb}, note = {P(論文), Delafossite-type CuAlO_2 doped ZnO transparent conducting films (ACZO films) were fabricated through pulsed laser deposition using an ArF excimer laser (λ=193 nm). As a result, excellent electrical properties due to a carrier-depletion effect caused by the addition of copper were obtained : low carrier density of 6.79 × 10^<19> cm^<-3>, and high Hall mobility of 58.3 cm^2/V・s. An average transmittance of 91.5% in the wavelength region of the solar spectrum (400~2500nm) was obtained. For high conversion efficiency as solar cells, double-textured structures with two types of concavo-convexlens were prepared through laser processing. As a result, a high haze ratio of 67.1% due to light confinement effect was obtained.}, pages = {41--52}, title = {薄膜太陽電池用ダブルテクスチャー型ACZO透明導電膜の作製}, volume = {122}, year = {2010} }