{"created":"2023-06-20T13:03:03.543848+00:00","id":1403,"links":{},"metadata":{"_buckets":{"deposit":"06f6d810-cc49-4dd7-90bd-2b58be2fb58d"},"_deposit":{"created_by":3,"id":"1403","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"1403"},"status":"published"},"_oai":{"id":"oai:osu.repo.nii.ac.jp:00001403","sets":["12:16:67"]},"author_link":["2982","2974","2977","2984","2983","2981","2975","2979","2972","2980","2976","2973","2971","2970","2978"],"item_2_biblio_info_14":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2010-02","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"40","bibliographicPageStart":"29","bibliographicVolumeNumber":"122","bibliographic_titles":[{"bibliographic_title":"大阪産業大学論集. 自然科学編"}]}]},"item_2_creator_6":{"attribute_name":"著者名(日)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"一井, 直弥"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"上西, 俊道"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"青木, 孝憲"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"鈴木, 晶雄"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"松下, 辰彦"}],"nameIdentifiers":[{}]}]},"item_2_creator_7":{"attribute_name":"著者名よみ","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"イチイ, ナオヤ"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"カミニシ, トシミチ"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"アオキ, タカノリ"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"スズキ, アキオ"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"マツシタ, タツヒコ"}],"nameIdentifiers":[{}]}]},"item_2_creator_8":{"attribute_name":"著者名(英)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"ICHII, Naoya","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"KAMINISHI, Toshimichi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"AOKI, Takanori","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"SUZUKI, Akio","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"MATSUSHITA, Tatsuhiko","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_2_description_1":{"attribute_name":"ページ属性","attribute_value_mlt":[{"subitem_description":"P(論文)","subitem_description_type":"Other"}]},"item_2_description_12":{"attribute_name":"抄録(英)","attribute_value_mlt":[{"subitem_description":"Zinc oxide (ZnO) and Al-doped zinc oxide (AZO) films were in turn deposited on cycloolefin polymer (COP) substrates by means of pulsed laser deposition (PLD) using an ArF excimer laser (λ=193 nm). In the laminated AZO/ZnO structure with ultra-thin layer of AZO (20 nm-thick), resistivity of 1.03×10^<-3> Ω・cm, Hall mobility of 20.1 cm^2/V・s, and carrier density of 2.46×10^<20> cm^<-3> were obtained. Ga-doped zinc oxide (GZO) thin films were deposited on COP substrates at room temperature by means of PLD using FHG of Nd: YAG laser (λ=266 nm, laser energy density 2～16 mJ/cm^2) at room temperature. As a result, the resistivity was improved from 6.61×10^<-4> Ω・cm to 5.94×10^4 Ω・cm for films annealed at a laser energy density of 12 mJ/cm^2.","subitem_description_type":"Other"}]},"item_2_source_id_13":{"attribute_name":"雑誌書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AN0002870X","subitem_source_identifier_type":"NCID"}]},"item_2_text_2":{"attribute_name":"記事種別(日)","attribute_value_mlt":[{"subitem_text_value":"論文"}]},"item_2_text_3":{"attribute_name":"記事種別(英)","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Article"}]},"item_2_text_9":{"attribute_name":"著者所属(日)","attribute_value_mlt":[{"subitem_text_value":"大阪産業大学工学研究科"},{"subitem_text_value":"大阪産業大学工学研究科"},{"subitem_text_value":"大阪産業大学工学部電子情報通信工学科"},{"subitem_text_value":"大阪産業大学工学部電子情報通信工学科"},{"subitem_text_value":"大阪産業大学工学部電子情報通信工学科"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2010-02-01"}],"displaytype":"detail","filename":"KJ00006130901.pdf","filesize":[{"value":"417.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"url":"https://osu.repo.nii.ac.jp/record/1403/files/KJ00006130901.pdf"},"version_id":"70c3c671-d0e4-4228-b9c9-fa935e5c2ba2"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"COP基板上に成膜した酸化亜鉛系透明導電膜","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"COP基板上に成膜した酸化亜鉛系透明導電膜"},{"subitem_title":"Transparent Conducting Zinc Oxide Films Fabricated on Cyclo-Olefin Polymer Substrates","subitem_title_language":"en"}]},"item_type_id":"2","owner":"3","path":["67"],"pubdate":{"attribute_name":"公開日","attribute_value":"2010-02-01"},"publish_date":"2010-02-01","publish_status":"0","recid":"1403","relation_version_is_last":true,"title":["COP基板上に成膜した酸化亜鉛系透明導電膜"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-06-20T14:01:48.259662+00:00"}