{"created":"2023-06-20T13:02:58.733087+00:00","id":1312,"links":{},"metadata":{"_buckets":{"deposit":"e7f8c530-bfbe-4a56-8cf1-addf5d7d8fae"},"_deposit":{"created_by":3,"id":"1312","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"1312"},"status":"published"},"_oai":{"id":"oai:osu.repo.nii.ac.jp:00001312","sets":["12:16:74"]},"author_link":["2743","2739","2740","2748","2751","2745","2750","2738","2741","2747","2752","2749","2746","2744","2742"],"item_2_alternative_title_5":{"attribute_name":"論文名よみ","attribute_value_mlt":[{"subitem_alternative_title":"Low Resistivity Transparent Conducting Oxide Thin Films Prepared by Pulsed Laser Deposition"}]},"item_2_biblio_info_14":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2004-02-28","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"25","bibliographicPageStart":"11","bibliographicVolumeNumber":"115","bibliographic_titles":[{"bibliographic_title":"大阪産業大学論集. 自然科学編"}]}]},"item_2_creator_6":{"attribute_name":"著者名(日)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"鈴木, 晶雄"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"松下, 辰彦"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"青木, 孝憲"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"安倉, 秀明"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"奥田, 昌宏"}],"nameIdentifiers":[{}]}]},"item_2_creator_7":{"attribute_name":"著者名よみ","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"スズキ, アキオ"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"マツシタ, タツヒコ"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"アオキ, タカノリ"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"アグラ, ヒデアキ"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"オクダ, マサヒロ"}],"nameIdentifiers":[{}]}]},"item_2_creator_8":{"attribute_name":"著者名(英)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"SUZUKI, Akio","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"MATSUSHITA, Tatsuhiko","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"AOKI, Takanori","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"AGURA, Hideaki","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"OKUDA, Masahiro","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_2_description_1":{"attribute_name":"ページ属性","attribute_value_mlt":[{"subitem_description":"P(論文)","subitem_description_type":"Other"}]},"item_2_description_12":{"attribute_name":"抄録(英)","attribute_value_mlt":[{"subitem_description":"In a bid obtain resistivity of on the order of 10^<-5> Ω・cm, we fabricated a series of transparent conducting films from indium tin oxide (ITO) and aluminum-doped zinc oxide (AZO) by pulsed laser deposition (PLD) using an ArF excimer laser (λ=193 nm). With this method, a magnetic field generated by powerful permanent magnets of rare-earth (NdFeB: 1.25 T) was applied perpendicularly to the plume generated between the target and substrate. The flying particles and clusters subjected to Lorentz force are thought to be associated with complicated evaporation processes. Using this method, we obtained an ITO film with a resistivity of 7.2×10^<-5> Ω・cm was obtained. However, the film resistivity obtained by this method was not always reproducible. In an attempt to improve the reproducibility, we adopted a target-to-substrate (T-S) distance of 10 mm instead of the 40～80 mm distance used beforehand. Under this new condition, the substrate was instantaneously exposed to the plume at high temperature. Upon receiving the thermal energies within the plume, the crystallization properties of the films improved and the values of carrier concentration increased. Statistically, our method had a 75 % probability of obtaining ITO films with a resistivity on the order of 10^<-5> Ω・cm. In the fabrication of AZO films, a resistivity of 8.54×10^<-5> Ω・cm was obtained by optimizing the applied magnetic field, T-S distance, and other preparation conditions.","subitem_description_type":"Other"}]},"item_2_source_id_13":{"attribute_name":"雑誌書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AN0002870X","subitem_source_identifier_type":"NCID"}]},"item_2_text_10":{"attribute_name":"著者所属(英)","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Department of Electrical Engineering and Electronics, Osaka Sangyo University"},{"subitem_text_language":"en","subitem_text_value":"Department of Electrical Engineering and Electronics, Osaka Sangyo University"},{"subitem_text_language":"en","subitem_text_value":"Department of Electrical Engineering and Electronics, Osaka Sangyo University"},{"subitem_text_language":"en","subitem_text_value":"Department of Electrical Engineering and Electronics, Osaka Sangyo University"},{"subitem_text_language":"en","subitem_text_value":"Department of Physics and Electronics, Osaka Prefecture University"}]},"item_2_text_2":{"attribute_name":"記事種別(日)","attribute_value_mlt":[{"subitem_text_value":"論文"}]},"item_2_text_3":{"attribute_name":"記事種別(英)","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"Article"}]},"item_2_text_9":{"attribute_name":"著者所属(日)","attribute_value_mlt":[{"subitem_text_value":"大阪産業大学工学部電気電子工学科"},{"subitem_text_value":"大阪産業大学工学部電気電子工学科"},{"subitem_text_value":"大阪産業大学工学部電気電子工学科"},{"subitem_text_value":"大阪産業大学大学院工学研究科"},{"subitem_text_value":"大阪府立大学"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2004-02-28"}],"displaytype":"detail","filename":"KJ00004175692.pdf","filesize":[{"value":"1.3 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"url":"https://osu.repo.nii.ac.jp/record/1312/files/KJ00004175692.pdf"},"version_id":"5e2be953-d03f-4cbe-8e13-056799cc2852"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Low resistivity","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Indium tin oxide films","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Al-doped zinc oxide film","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Pulsed laser deposition","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Surface flatness","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Interaction between plume and magnetic field","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Target-to-substrate distance","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Liquid crystal transparent electrode","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Organic electroluminescence transparent anode","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"High deposition rate","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Low Resistivity Transparent Conducting Oxide Thin Films Prepared by Pulsed Laser Deposition","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Low Resistivity Transparent Conducting Oxide Thin Films Prepared by Pulsed Laser Deposition","subitem_title_language":"en"}]},"item_type_id":"2","owner":"3","path":["74"],"pubdate":{"attribute_name":"公開日","attribute_value":"2004-02-28"},"publish_date":"2004-02-28","publish_status":"0","recid":"1312","relation_version_is_last":true,"title":["Low Resistivity Transparent Conducting Oxide Thin Films Prepared by Pulsed Laser Deposition"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-06-20T14:03:30.430245+00:00"}