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COP基板上に成膜した酸化亜鉛系透明導電膜
https://osu.repo.nii.ac.jp/records/1403
https://osu.repo.nii.ac.jp/records/1403b5af44a5-c738-4642-b7c5-57d99ff54b41
名前 / ファイル | ライセンス | アクション |
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KJ00006130901.pdf (417.0 kB)
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Item type | 紀要論文(ELS) / Departmental Bulletin Paper(1) | |||||
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公開日 | 2010-02-01 | |||||
タイトル | ||||||
タイトル | COP基板上に成膜した酸化亜鉛系透明導電膜 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Transparent Conducting Zinc Oxide Films Fabricated on Cyclo-Olefin Polymer Substrates | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ページ属性 | ||||||
内容記述タイプ | Other | |||||
内容記述 | P(論文) | |||||
記事種別(日) | ||||||
論文 | ||||||
記事種別(英) | ||||||
en | ||||||
Article | ||||||
著者名(日) |
一井, 直弥
× 一井, 直弥× 上西, 俊道× 青木, 孝憲× 鈴木, 晶雄× 松下, 辰彦 |
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著者名よみ |
イチイ, ナオヤ
× イチイ, ナオヤ× カミニシ, トシミチ× アオキ, タカノリ× スズキ, アキオ× マツシタ, タツヒコ |
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著者名(英) |
ICHII, Naoya
× ICHII, Naoya× KAMINISHI, Toshimichi× AOKI, Takanori× SUZUKI, Akio× MATSUSHITA, Tatsuhiko |
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著者所属(日) | ||||||
大阪産業大学工学研究科 | ||||||
著者所属(日) | ||||||
大阪産業大学工学研究科 | ||||||
著者所属(日) | ||||||
大阪産業大学工学部電子情報通信工学科 | ||||||
著者所属(日) | ||||||
大阪産業大学工学部電子情報通信工学科 | ||||||
著者所属(日) | ||||||
大阪産業大学工学部電子情報通信工学科 | ||||||
抄録(英) | ||||||
内容記述タイプ | Other | |||||
内容記述 | Zinc oxide (ZnO) and Al-doped zinc oxide (AZO) films were in turn deposited on cycloolefin polymer (COP) substrates by means of pulsed laser deposition (PLD) using an ArF excimer laser (λ=193 nm). In the laminated AZO/ZnO structure with ultra-thin layer of AZO (20 nm-thick), resistivity of 1.03×10^<-3> Ω・cm, Hall mobility of 20.1 cm^2/V・s, and carrier density of 2.46×10^<20> cm^<-3> were obtained. Ga-doped zinc oxide (GZO) thin films were deposited on COP substrates at room temperature by means of PLD using FHG of Nd: YAG laser (λ=266 nm, laser energy density 2~16 mJ/cm^2) at room temperature. As a result, the resistivity was improved from 6.61×10^<-4> Ω・cm to 5.94×10^4 Ω・cm for films annealed at a laser energy density of 12 mJ/cm^2. | |||||
雑誌書誌ID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN0002870X | |||||
書誌情報 |
大阪産業大学論集. 自然科学編 巻 122, p. 29-40, 発行日 2010-02 |